We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured.

Broadband S-parameter measurements of Parylene C microwave microfluidic devices from 100 MHz - 110 GHz. The Parylene C devices consisted of 400 nm platinum coplanar waveguides (CPW) (50 um center conductor, 5 um gaps, 200 um ground planes) deposited on fused silica with 6.5 um of Parylene C on top, capped with a PDMS microfluidic layer aligned over the CPWs. The dimensions of the PDMS microfluidic channels were approximately 210 um wide by 100 um deep. The total CPW line length was 10.000 mm and the channel length was 4.160 mm, where the channel was aligned over the center of the CPW. We measured the S-parameters of Parylene C devices filled with three different fluid conditions at different intervals over a 2 month period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, and 1xPBS at 37 degrees Celsius. We obtained measurements of both the fluid-filled and empty channel at each measurement day. We measured broadband S-parameters with a vector network analyzer and extender heads at a source power of -17 dBm on a temperature-controlled probe station. The S-parameters were calibrated to the probe tips with measurements of a gold reference chip in combination with multiline TRL in the NIST Microwave Uncertainty Framework. The differences in S-parameters from day 0 were plotted over time to observe changes in the dielectric properties of the Parylene C device during soaking.

Electromagnetic simulations of Parylene C devices, described in "The influence of intrinsic water and ion permeation of the dielectric properties of Parylene C films". We simulated various geometries of the device with different fluids inside and calculated S-parameters from extracted RLCG results. We also provide scripts to work up the simulation results into S-parameter plots.

Electromagnetic simulations of Parylene C devices, described in "The influence of intrinsic water and ion permeation of the dielectric properties of Parylene C films". We simulated various geometries of the device with different fluids inside and calculated S-parameters from extracted RLCG results. We also provide scripts to work up the simulation results into S-parameter plots.

This data set contains data used to generate plots in the paper "Microwave Characterization of Parylene C Dielectric and Barrier Properties".It contains the broadband S-parameter measurements of Parylene C coated CPWs exposed to water and ionic fluid, simulation set-up files and RLCG results, formatted data for each of the plots, and scripts to generate each figure.Simulations must be opened using ANSYS Electronics Desktop.Scripts must be executed using MATLAB.See readme file for complete description of each individual file.

This data set contains data used to generate plots in the paper "Microwave Characterization of Parylene C Dielectric and Barrier Properties".It contains the broadband S-parameter measurements of Parylene C coated CPWs exposed to water and ionic fluid, simulation set-up files and RLCG results, formatted data for each of the plots, and scripts to generate each figure.Simulations must be opened using ANSYS Electronics Desktop.Scripts must be executed using MATLAB.See readme file for complete description of each individual file.

This data publication contains the mass spectrometry chemical characterization of microplastic and nanoplastic chemical analysis. The data from this study includes mass spectra of pure, mixed, and weathered microplastics and nanoplastics at high and low fragmentation, extracted ion chronograms, Kendrick mass defect plots, code, and the derived and processed data. The data analysis code (MATLAB 2022a*) used for unsupervised learning of cluster and compositional relationships is also included. The code employs principal component analysis for dimensionality reduction, learns the resulting datasets' latent dimensionality, and completes Gaussian mixture modeling and fuzzy c-means clustering.*Any mention of commercial products is for information only; it does not imply recommendation or endorsement by NIST.

This data publication contains the mass spectrometry chemical characterization of microplastic and nanoplastic chemical analysis. The data from this study includes mass spectra of pure, mixed, and weathered microplastics and nanoplastics at high and low fragmentation, extracted ion chronograms, Kendrick mass defect plots, code, and the derived and processed data. The data analysis code (MATLAB 2022a*) used for unsupervised learning of cluster and compositional relationships is also included. The code employs principal component analysis for dimensionality reduction, learns the resulting datasets' latent dimensionality, and completes Gaussian mixture modeling and fuzzy c-means clustering.*Any mention of commercial products is for information only; it does not imply recommendation or endorsement by NIST.

Nanocalorimeter calibration data. The file format is Origin Pro* project files, which include multiple data worksheets and derived graphs. *Any mention of commercial products is for information only; it does not imply recommendation or endorsement by NIST. Please cite the related paper "Practical Guide to the Design, Fabrication and Calibration of NIST Nanocalorimeters" by Feng Yi, Michael D. Grapes, and David A. LaVan in the Journal of Research of the National Institute of Standards and Technology, Volume 124 (in press).